JPS62175070U - - Google Patents
Info
- Publication number
- JPS62175070U JPS62175070U JP6054186U JP6054186U JPS62175070U JP S62175070 U JPS62175070 U JP S62175070U JP 6054186 U JP6054186 U JP 6054186U JP 6054186 U JP6054186 U JP 6054186U JP S62175070 U JPS62175070 U JP S62175070U
- Authority
- JP
- Japan
- Prior art keywords
- vacuum
- substrate attachment
- attachment part
- evaporation source
- evaporation apparatus
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000007738 vacuum evaporation Methods 0.000 claims description 3
- 230000008021 deposition Effects 0.000 claims 2
- 238000001704 evaporation Methods 0.000 claims 2
- 230000008020 evaporation Effects 0.000 claims 2
- 239000000758 substrate Substances 0.000 claims 2
- 239000000463 material Substances 0.000 claims 1
- 238000010438 heat treatment Methods 0.000 description 1
- 239000011148 porous material Substances 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
- Electrodes Of Semiconductors (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6054186U JPS62175070U (en]) | 1986-04-22 | 1986-04-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6054186U JPS62175070U (en]) | 1986-04-22 | 1986-04-22 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62175070U true JPS62175070U (en]) | 1987-11-06 |
Family
ID=30893040
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6054186U Pending JPS62175070U (en]) | 1986-04-22 | 1986-04-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62175070U (en]) |
-
1986
- 1986-04-22 JP JP6054186U patent/JPS62175070U/ja active Pending